VIT-AFM-V1
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VIT-AFM-V1
VIT-AFM-V1 is the FPGA-based real-time autofocus model using the principle of optical trigonometry. It is applied to the automatic optical inspection (AOI) of a high magnification optical system that measures the target object’s position in real time and sets the optical image to detect defects of 1μm or less quickly in semiconductor and display tests.
| Model | VIT-AFM-V1 |
|---|---|
| Sampling Rate | Up to 1.0KHz |
| Sensing Type | Optical Triangulation |
| Tube Module | 1.0X Mag, 21mm Image Circle |
| AF sensor | -Auto Exposure / Auto Laser Control -Laser Brightness Control by PD Feedback -Multiple Layer Detection (Max.5) -Support Real-time Graph Display |
| Tracking Mode | OFF / Single / Continuous |
| Motion Control | -Support Jog / Absolute / Incremental Move -Support HW Limit & SW Limit -Auto Calibration |
| Interface | RS-485(Up to 921,600bps) |
| Linearity Error | < 0.1 % (Varies Depending on the Optic Performance) |
| Repeatability | < 0.2μm (Varies Depending on the Optic Performance) |
| Stroke | 10mm (±5mm) |
| Resolution | 0.05μm/pulse |
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